Ruthenium (Ru) & Ru alloys target is sputtered to form thin films which could be used as layers for semiconductors and data storage.
| Symbol | : | Ru |
| Purity | : | 3N+ |
| Form | : | Planar |
| Color / Appearance | : | Silver grey, metallic |
| Typical Density | : | 12.33g/cm?(100Ru) |
| Typical Dimension | : | Φ165 mm Other dimensions available |
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